Industrial Power Supplies

As a leading company in industrial power supplies, PSTEK has designed and manufactured high power and high-precision power supplies for various state-of-the-art industrial facilities.

Electrostatic Chuck (ESC) Power Supply

Precision power supply for driving electrostatic chucks for semiconductor wafer clamping.

Precise voltage control within ±0.1%

Fast response time <1ms

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Photonic Curing System (Hi-Pulse)

PSTEK's Photonic curing system uses a constant power regulation method that regulates both output voltage and current, and thus can always deliver uniform energy during lamp irradiation, which makes it suitable for the mass production of quality products. A curing dimension per a lamp house is up to 200 mm in the lateral direction, which makes it possible to mass produce and apply to large areas with a small number of lamps.

Constant power regulation is enabled by the high speed (MW per pulse) switching technology

Uniform energy is delivered to equipment by changing the pulse width during lamp irradiation, and uniform quality products can be produced, making the system suitable for a mass production system

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Plasma Power Supplies

Four types of plasma power supplies: DC, Dual-DC, Pulsed-DC, and RF. Optimized for semiconductor and display processes such as sputtering, etching, and CVD.

DC / Dual-DC / Pulsed-DC / RF lineup

High-speed digital arc control (< 10μs)

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